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학술지 Design and Fabrication of Vibration Based Energy Harvester Using Microelectromechanical System Piezoelectric Cantilever for Low Power Applications
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김문근, 이상균, 양일석, 정재화, 민남기, 권광호
Journal of Nanoscience and Nanotechnology, v.13 no.12, pp.7932-7937
American Scientific Publishers (ASP)
13VB2300, BLDC 모터용 고전압/대전류 파워모듈 및 ESD 기술개발, 양일석
We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O3 (PZT) cantilever was designed as a mechanical vibration energy-harvesting system for low power applications. The resonant frequency of the multilayer composition cantilevers were simulated using the finite element method (FEM) with parametric analysis carried out in the design process. According to simulations, the resonant frequency, voltage, and average power of a dual-beam cantilever was 69.1 Hz, 113.9 mV, and 0.303 μW, respectively, at ptimal resistance and 0.5 g (gravitational acceleration, m/s2). Based on these data, we subsequently fabricated cantilever devices using dual-beam cantilevers. The harvested power density of the dual-beam cantilever compared favorably with the simulation. Experiments revealed the resonant frequency, voltage, and average power density to be 78.7 Hz, 118.5 mV, and 0.34 μW, respectively. The error between the measured and simulated results was about 10%. The maximum average power and power density of the fabricated dual-beam cantilever at 1 g were 0.803 μW and 1322.80 μW cm?3, respectively. Furthermore, the possibility of a MEMS-scale power source for energy conversion experiments was also tested. Copyright © 2013 American Scientific Publishers.
Cantilever, Energy Harvesting, MEMS, Piezoelectric, Resonant Frequency.
KSP 제안 키워드
Average power density, Design and fabrication, Design process, Dual beam, Energy Conversion, Energy Harvesting(EH), Finite Element Method(FEM), Gravitational acceleration, Low power applications, Micro-electro-mechanical system(MEMS), Parametric analysis