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학술지 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Screen Printing Technique
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저자
문승언, 이형근, 최낙진, 이재우, 최창억, 양우석, 김종대, 정종진, 유도준
발행일
201310
출처
Sensors and Actuators B : Chemical, v.187, pp.598-603
ISSN
0925-4005
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.snb.2013.05.002
협약과제
13VB1600, 스마트&그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 권종기
초록
Micro C2H5OH gas sensor based on micro-heater and tin oxide thick film was fabricated by using complementary metal-oxide semiconductor (CMOS) compatible micro electro mechanical systems (MEMS) process, which showed low power consumption and high response. Semiconducting SnO 2 nano-powders were synthesized via co-precipitation method, and to increase the sensitivity for alcohol gas rare metal dopants were added. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique and in the structure of micro-heater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. The response of the micro gas sensor was 0.78 for 2 ppm alcohol with lower power consumption (35 mW) than that of the commercial alcohol gas sensor. The mechanical stability of the sensor was tested under the higher direct current (DC) power than that of the normal operation power and the variation rate of the micro-heater resistance was below 2% after 105 times repetitive 35 mW pulse operations. © 2013 Elsevier B.V. All rights reserved.
키워드
Alcohol, Gas sensor, Micro-heater, Surface micromachining
KSP 제안 키워드
Alcohol gas sensor, Bridge type, Complementary metal-oxide-semiconductor(CMOS), Direct current(DC), High response, Lower power, Mechanical stability, Metal dopants, Metal-oxide(MOX), Micro gas sensor, Micro-electro-mechanical system(MEMS)