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학술지 A Fiber-to-Chip Coupler Based on Si/SiON Cascaded Tapers for Si Photonic Chips
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저자
박현대, 김상기, 박재규, 주지호, 김경옥
발행일
201312
출처
Optics Express, v.21 no.24, pp.29313-29319
ISSN
1094-4087
출판사
Optical Society of America(OSA)
DOI
https://dx.doi.org/10.1364/OE.21.029313
협약과제
13VB1800, 실리콘 나노포토닉스 기반 차세대 컴퓨터 칩기술, 김경옥
초록
This paper reports a fiber-to-chip coupler consisting of a silicon inverted taper and a silicon oxynitride (SiON) double stage taper, where the cascaded taper structure enables adiabatic mode transfer between a submicron silicon waveguide and a single mode fiber. The coupler, fabricated by a simplified process, demonstrates an average coupling loss of 3.6 and 4.2 dB for TM and TE polarizations, respectively, with a misalignment tolerance of 짹 2.2 μm for 1 dB loss penalty. © 2013 Optical Society of America.
KSP 제안 키워드
Coupling loss, Double stage, Loss penalty, Silicon waveguide, Single-mode fiber(SMF), Taper structure, misalignment tolerance, silicon oxynitride