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학술지 Effect of Silicide/Silicon Hetero-Junction Structure on Thermal Conductivity and Seebeck Coefficient
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저자
최원철, 박영삼, 현영훈, 정태형, 김재현, 김수정, 전효진, 신민철, 장문규
발행일
201312
출처
Journal of Nanoscience and Nanotechnology, v.13 no.12, pp.7801-7805
ISSN
1533-4880
출판사
American Scientific Publishers (ASP)
DOI
https://dx.doi.org/10.1166/jnn.2013.8103
협약과제
13ZB1100, 스마트 융.복합 IT부품소재 기술개발, 남은수
초록
We fabricated a thermoelectric device with a silicide/silicon laminated hetero-structure by using RF sputtering and rapid thermal annealing. The device was observed to have Ohmic characteristics by I-V measurement. The temperature differences and Seebeck coefficients of the proposed silicide/silicon laminated and bulk structure were measured. The laminated thermoelectric device shows suppression of heat flow from the hot to cold side. This is supported by the theory that the atomic mass difference between silicide and silicon creates a scattering center for phonons. The major impact of our work is that phonon transmission is suppressed at the interface between silicide and silicon without degrading electrical conductivity. The estimated thermal conductivity of the 3-layer laminated device is 1262짹37 W/m K. Thus, by using the 3-layer laminated structure, thermal conductivity is reduced by around 16% compared to bulk silicon. However, the Seebeck coefficient of the thermoelectric device is degraded compared to that of bulk silicon. It is understood that electrical conductivity is improved by using silicide as a scattering center. Copyright © 2013 American Scientific Publishers All rights reserved.
키워드
Hetero-Structure, Seebeck Coefficient, Thermoelectricity
KSP 제안 키워드
Bulk structure, Electrical conductivity(EC), I-V measurement, Initialization Vector(IV), Laminated structures, Phonon transmission, Scattering centers, Seebeck coefficient, Thermoelectric device, bulk silicon, heat flow