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학술지 Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
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저자
문승언, 최낙진, 이형근, 이재우, 양우석
발행일
201308
출처
ETRI Journal, v.35 no.4, pp.617-624
ISSN
1225-6463
출판사
한국전자통신연구원 (ETRI)
DOI
https://dx.doi.org/10.4218/etrij.13.1912.0008
협약과제
12MB2400, 스마트&그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 김종대
초록
Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a NO2 or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module. © 2013 ETRI.
키워드
Gas sensor, Metal oxide, Microheater, Nanopowder
KSP 제안 키워드
CO gas sensor, Change in resistance, Drop-coated, Environmental monitoring, Low-Power, Metal-oxide(MOX), Micro-electro-mechanical system(MEMS), Monitoring applications, Personal digital assistant(PDA), Real-Time, Semiconductor type