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학술지 Index-Matched Indium Tin Oxide Electrodes for Capacitive Touch Screen Panel Applications
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저자
홍찬화, 신재헌, 주병권, 김경현, 박래만, 김보슬, 정우석
발행일
201311
출처
Journal of Nanoscience and Nanotechnology, v.13 no.11, pp.7756-7759
ISSN
1533-4880
출판사
American Scientific Publishers (ASP)
DOI
https://dx.doi.org/10.1166/jnn.2013.7814
협약과제
13VB1500, 윈도우 일체형 30인치급 터치센서 개발, 정우석
초록
Index-matched indium tin oxide (ITO) electrodes for capacitive touch screen panels have been fabricated to improve optical transmittance and reduce the difference of reflectance (?뼞R) between the etched and un-etched regions. 8.5 nm Nb2O5 and 49 nm SiO2 thin films were deposited by magnetron sputtering as index-matching layers between an ITO electrode and a glass substrate. In case of 30 nm ITO electrode, a 4.3% improvement in the optical transmittance and a ?뼞R of less than 1% were achieved, along with a low sheet resistance of 90 廓/?뼞. Copyright © 2013 American Scientific Publishers.
키워드
Capacitive touch screen panel, Index matched ITO
KSP 제안 키워드
5 nm, Capacitive Touch screen, Glass substrate, ITO electrode, Indium tin oxide electrodes, Magnetron sputtering, Optical transmittance, indium tin oxide(ITO), low sheet resistance, matching layer, thin film(TF)