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학술지 Low-Power-Consumption and High-Sensitivity NO2 Micro Gas Sensors Based on a Co-Planar Micro-Heater Fabricated by Using a CMOS-MEMS Process
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저자
문승언, 이재우, 박소정, 박종혁, 박강호, 김종대
발행일
201001
출처
Journal of the Korean Physical Society, v.56 no.1, pp.434-438
ISSN
0374-4884
출판사
한국물리학회 (KPS)
DOI
https://dx.doi.org/10.3938/jkps.56.434
협약과제
09MB1500, 유비쿼터스 단말용 부품 모듈, 김종대
초록
Small-scale, low-power-consumption, and high-sensitivity NO2 gas sensors based on ZnO nanorods are reported in this work. To activate the chemical absorption and desorption for NO2 gas, we embedded co-planar micro-heater in a micro gas sensor, that was made by using a Complementary Metal-oxide-semiconductor compatible Microelectromechanical Systems(CMOS-MEMS) process. To acquire simple fabrication and low fabrication cost, we located the micro-heater and the sensing electrode in the same plane. High-quality single-crystalline ZnO nanorods were selectively grown by using photolithography and a hydrothermal method. Their structural properties were confirmed by using X-ray diffractometry (XRD), energy dispersive X-ray spectroscopy microanalysis (EDAX), Scanning Electron Microscopy (SEM), and Transmission Electron Microscopy (TEM). The temperature-dependent current-voltage characteristics were measured to optimize the operating temperature of the fabricated devices as a chemical gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.
키워드
Hydrothermal growth method, Micro-heater, Semiconducting gas sensor, ZnO nanorods
KSP 제안 키워드
CMOS-MEMS, Chemical absorption, Chemical gas sensor, Co-Planar, Complementary metal-oxide-semiconductor(CMOS), Gas response, Growth method, High Sensitivity, High-quality, MEMS process, Metal-oxide(MOX)