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학술지 Fabrication of Self-Aligned TFTs with a Ultra-Low Temperature Polycrystalline Silicon Process on Metal Foils
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저자
문제현, 김용해, Dong-Jin Park, Choong-Heui Chung, 강승열, 이진호
발행일
201011
출처
Solid-State Electronics, v.54 no.11, pp.1326-1331
ISSN
0038-1101
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.sse.2010.05.021
협약과제
07MB1600, Flexible 디스플레이, 조경익
초록
We have fabricated self-aligned thin-film transistors (TFTs) using a ultra-low temperature (T < 200 °C) polycrystalline silicon process on stainless steel foil substrates. The overall processing scheme and technical details were discussed from the viewpoint of electrical and mechanical stabilities. Large grain poly-Si films were obtained with sequential lateral solidification (SLS) method. Plasma enhanced atomic layer deposition (PEALD) method was used to form Al2O3 gate dielectric films. The TFT performances were enhanced by plasma oxidation of the polycrystalline Si surface prior to Al2O3 gate dielectric film deposition. The fabricated TFT showed a field effect mobility of 95 cm2/Vs, a threshold voltage of -3 V and a sub-threshold swing of 0.45 V/dec. © 2010 Elsevier Ltd. All rights reserved.
키워드
Atomic layer deposition, Metal foil, Polycrystalline Si, TFT
KSP 제안 키워드
3 V, Gate dielectric film, Large grain, Low temperature(LT), Low-temperature polycrystalline Silicon(LTPS), Metal foil, Plasma-enhanced atomic layer deposition, Polycrystalline silicon(poly-Si), Sequential lateral solidification, Si film, Si surface