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학술지 A Silicon Nitride Microdisk Resonator with a 40-nm-Thin Horizontal Air Slot
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저자
이신영, 음석찬, 장지수, 허철, 성건용, 신중훈
발행일
201005
출처
Optics Express, v.18 no.11, pp.11209-11215
ISSN
1094-4087
출판사
Optical Society of America(OSA)
DOI
https://dx.doi.org/10.1364/OE.18.011209
협약과제
10ZC1100, 메가컨버전스 핵심기술 개발, 함호상
초록
We design and fabricate pedestal-type, 15 μm diameter silicon nitride microdisk resonators on Si chip with horizontal air-slot using selective wet etching between Si, SiO2, and SiNx. As the slot structure is determined by deposition process, air slots that are as thin as 40 nm and as deep as 5 μm with ultra-smooth slot surfaces can easily be fabricated with photolithography only. Fundamental TM-like slot mode in which the E-field is greatly enhanced within slot was observed with an intrinsic Q factor of ~34,000 ( {\\lambda}res= 1523.7nm) and energy overlap in slot region of 21.6%. © 2010 Optical Society of America.
KSP 제안 키워드
40 nm, As 4, Quality-factor(Q-factor), Selective wet etching, Silicon Nitride, Slot region, Ultra-smooth, deposition process, e-field, microdisk resonator