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학술지 Maskless Laser Direct Patterning of PEDOT/PSS Layer for Soluble Process Organic Thin Film Transistor
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저자
신홍식, 백규하, 박성수, 송기철, 이가원, 이희덕, 왕진석, 이기준, 도이미
발행일
201005
출처
Journal of Nanoscience and Nanotechnology, v.10 no.5, pp.3185-3188
ISSN
1533-4880
출판사
American Scientific Publishers (ASP)
DOI
https://dx.doi.org/10.1166/jnn.2010.2248
초록
In this work, we have fabricated TIPS-pentacene TFTs with conductive polymer (3,4-ethylenedioxythiophene):poly(4-stylenesulfonate) (PEDOT:PSS) source/drain electrodes which is patterned by maskless laser direct patterning (LDP). The 5-μm resolution of source and drain patterns with PEDOT:PSS were clearly defined. Furthermore, the OTFTs with 10-μm channel length were successfully achieved by exposing the focused Neodymium:Yttrium Aluminum Garnet (Nd:YAG) laser beam onto the spin-coated PEDOT:PSS films and developing with deionized water. The electrical performance of the TIPS-pentacene TFTs with PEDOT:PSS source/drain electrodes were improved with decrease of the sheet resistance of PEDOT: PSS films when the PEDOT: PSS films were annealed at the temperature above 200 °C. Copyright © 2010 American Scientific Publishers All rights reserved.
키워드
Laser direct patterning, Organic tft, PEDOT, PSS, TIPS-Pentacene
KSP 제안 키워드
4-Ethylenedioxythiophene(EDOT), 4-ethylenedioxythiophene):poly(4-styrenesulfonate)(PEDOT:PSS), Channel Length, Deionized water, Laser beams, Organic TFT, Organic thin-film transistors, Source/drain electrodes, Spin-coated, TIPS-pentacene, Thin-Film Transistor(TFT)