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학술지 Size and Surface Modification Effects on the pH Response of Si Nanowire Field-Effect Transistors
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저자
백인복, 이진홍, 이성재, 아칠성, 양종헌, 박찬우, 김태엽, 성건용
발행일
201207
출처
Journal of Nanoscience and Nanotechnology, v.12 no.7, pp.5678-5682
ISSN
1533-4880
출판사
American Scientific Publishers (ASP),
DOI
https://dx.doi.org/10.1166/jnn.2012.6362
협약과제
11SC2300, 스마트 바이오 센서 시스템, 성건용
초록
We investigated the effects of Si nanowire (SiNW) dimensions and their surface modi?cations on the pH-dependent electronic transport characteristics of SiNW Electrolyte-Insulator-Semiconductor Field-Effect Transistors (EISFETs). The threshold voltages, V th's, of all devices were extracted from the I d-V g characteristics with V g applied to the reference electrode immersed in different pH solutions, and their pH-dependences were analyzed for various devices. We found that our devices produce the systematic pH-dependence of V th with respect to the SiNW's length and show signi?cant changes in a linear pH region and a pH sensitivity upon the Si surface modi?cations. Particularly in the case of the APTES-treated surface, the linear variation was observed in the wide region of pH = 2~11 with the sensitivity of 54.7 짹 0.6 mV/pH. Also we compared our data to a theoretical result based on the Gouy-Chapmam-Stern-Graham model and found a reasonable agreement between them. © 2012 American Scientific Publishers.
키워드
Field Effect, PH Sensor, Silicon Nanowire
KSP 제안 키워드
Different pH, Electrolyte-insulator-semiconductor(EIS), Electronic Transport, Field-effect transistors(FETs), PH response, PH sensitivity, Si nanowires, Si surface, Silicon nanowires(SiNWs), Transport characteristics, nanowire field-effect transistors