ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

논문 검색
구분 SCI
연도 ~ 키워드

상세정보

학술지 Fabrication of HCHO Gas Sensor Based on MEMS Heater and Inkjet Printing
Cited 8 time in scopus Download 0 time Share share facebook twitter linkedin kakaostory
저자
이형근, 문승언, 최낙진, 양우석, 김종대
발행일
201201
출처
한국물리학회, v.60 no.2, pp.225-229
ISSN
0374-4884
출판사
한국물리학회
DOI
https://dx.doi.org/10.3938/jkps.60.225
협약과제
11MB2100, 스마트and그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 김종대
초록
We have developed In 2O 3 particle ink that can be applied in inkjet printing on a microelectromechanical systems (MEMS) heater and have fabricated semiconductor-type gas sensor based on that heater. The formaldehyde (HCHO) sensor prepared by inkjet printing showed comparable or even higher sensitivity compared to that of the sensor prepared from conventional screen printing when increasing the number of printings was increased. By virtue of its non-contact printing nature, this In 2O 3 ink as a sensing material could be deposited on the MEMS heater without damage to the heater membrane. We found that the sensor prepared on the MEMS heater by using the inkjet deposition technique showed response/recovery times of 7s/17s with a sensitivity of 0. 63 at an 18 mW power and 60 ppb HCHO. © 2012 The Korean Physical Society.
키워드
Formaldehyde, Gas sensor, Inkjet printing, MEMS heater
KSP 제안 키워드
Deposition technique, Higher sensitivity, Micro-electro-mechanical system(MEMS), Non-contact, O 3, Semiconductor type, Sensing material, Sensor based, contact printing, gas sensors, inkjet printing