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학술지 Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors
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저자
안성덕, 강승열, 오지영, 서경수, 조경익, 구재본
발행일
201212
출처
ETRI Journal, v.34 no.6, pp.970-973
ISSN
1225-6463
출판사
한국전자통신연구원 (ETRI)
DOI
https://dx.doi.org/10.4218/etrij.12.0212.0266
협약과제
12MB1700, 모바일 플렉시블 입출력 플랫폼, 안성덕
초록
In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are 0.1 cm2/Vs and 106 respectively. The developed OTFT can be applied to a flexible display on a plastic substrate. © 2012 ETRI.
키워드
OTFT, PCOVD, Pentacene, Plastic substrate
KSP 제안 키워드
Deposition method, Growth characteristics, Large area deposition, ON/OFF current ratio, Organic thin-film transistors, Organic vapor, Plastic substrate, Pressure control, Thin-Film Transistor(TFT), design and build, flexible display