ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

논문 검색
구분 SCI
연도 ~ 키워드

상세정보

학술지 Fabrication of Nano Scale Electrode for Sensor Using Nanoimprint Lithography
Cited 2 time in scopus Download 1 time Share share facebook twitter linkedin kakaostory
저자
최낙진, 이정현, 방경숙, 이형근, 문승언, 양우석, 이효영
발행일
201508
출처
Journal of Nanoelectronics and Optoelectronics, v.10 no.4, pp.480-484
ISSN
1555-130X
출판사
American Scientific Publishers
DOI
https://dx.doi.org/10.1166/jno.2015.1786
협약과제
14MB1600, 스마트&그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 권종기
초록
We have developed a single-layer UV-nanoimprint process, which was utilized to fabricate 9 by 9 crossbar circuits with various nano-scaled electrodes. Fabricated nano-sized electrode using mold has sub 100 nm width and sub 1 nm average roughness. Their surface morphology was observed by using atomic force microscopy (AFM) and scanning electron microscopy (SEM). And we have proved that the double layer electrodes can be fabricated by layer by layer fabrication method of nanoimprint technique.
키워드
Nano-scaled electrode, Sensor, UV nanoimprint
KSP 제안 키워드
Atomic force microscope(AFM), Atomic force microscopy (afm), Double layer, Fabrication method, Layer-by-Layer(LbL), Scanning electron microscopy(S.E.M.), Single-layer, UV nanoimprint, average roughness, nano-scale, nano-sized