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학술지 In Vitro Extracellular Recording and Stimulation Performance of Nanoporous Gold-Modified Multi-Electrode Arrays
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김용희, 김국화, 김아영, 한영환, 정명애, 정상돈
Journal of Neural Engineering, v.12 no.6, pp.1-10
Institute of Physics (IOP)
15ZE1100, ETRI 창의연구실 사업, 정성영
Objective. Nanoporous gold (Au) structures can reduce the impedance and enhance the charge injection capability of multi-electrode arrays (MEAs) used for interfacing neuronal networks. Even though there are various nanoporous Au preparation techniques, fabrication of MEA based on low-cost electro-codeposition of Ag:Au has not been performed. In this work, we have modified a Au MEA via the electro-codeposition of Ag:Au alloy, followed by the chemical etching of Ag, and report on the in vitro extracellular recording and stimulation performance of the nanoporous Au-modified MEA. Approach. Ag:Au alloy was electro-codeposited on a bilayer lift-off resist sputter-deposition passivated Au MEA followed by chemical etching of Ag to form a porous Au structure. Main results. The porous Au structure was analyzed by scanning electron microscopy and tunneling electron microscopy and found to have an interconnected nanoporous Au structure. The impedance value of the nanoporous Au-modified MEA is 15.4 0.55 k廓 at 1 kHz, accompanied by the base noise V rms of 2.4 0.3 μV. The charge injection limit of the nanoporous Au-modified electrode estimated from voltage transient measurement is approximately 1 mC cm-2, which is comparable to roughened platinum and carbon nanotube electrodes. The charge injection capability of the nanoporous Au-modified MEA was confirmed by observing stimulus-induced spikes at above 0.2 V. The nanoporous Au-modified MEA showed mechanical durability upon ultrasonic treatment for up to an hour. Significance. Electro-codeposition of Ag:Au alloy combined with chemical etching Ag is a low-cost process for fabricating nanoporous Au-modified MEA suitable for establishing the stimulus-response relationship of cultured neuronal networks.
Charge injection limit, Electro-co-deposition, Multi-electrode array, Nanoporous gold, Neuronal recording
KSP 제안 키워드
Carbon nano-tube(CNT), Cultured neuronal networks, Electro-co-deposition, Extracellular recording, Gold-modified, Lift-off resist, Low-cost, Mechanical durability, Multi-electrode array, Nanoporous gold, Neuronal recording