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학술지 The Improvement of Mechanical and Dielectric Properties of Ordered Mesoporous Silica Film using TEOS-MTES Mixed Silica Precursor
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저자
하태정, 최선규, 정상배, 유병곤, 박형호
발행일
200805
출처
Ceramics International, v.34 no.4, pp.947-951
ISSN
0272-8842
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.ceramint.2007.09.070
협약과제
08MB1900, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
초록
Due to the rapid decrease in physical dimension of today's devices, lower resistive metal and/or lower dielectric constant material have to be applied. Recently, ordered mesoporous silica film has been drawn an attention for low-k application due to its ordered pore structure. However, it has been more required that low-k dielectrics should have low leakage current, high breakdown strength and high mechanical stabilities. In this study, ordered mesoporous silica films were prepared by sol-gel process using tetraethylorthosilane and methyltriethoxysilane as a mixed silica precursor in order to increase the mechanical and dielectric properties. It was found that the properties of the films were improved when the pore ordering and the amount of the incorporated methyl ligand were maximized. © 2007 Elsevier Ltd and Techna Group S.r.l.
키워드
A. Sol-gel process, Brij-76, D. SiO 2, E. Insulators
KSP 제안 키워드
Breakdown Strength, Brij-76, Dielectric Constant, Dielectric properties, Low-k dielectrics, Methyl ligand, Ordered mesoporous silica film, Physical dimension, Pore ordering, Pore structure, SiO 2