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학술지 Improvement of Uncooled Infrared Imaging Detector by using Mesoporous Silica as a Thermal Isolation Layer
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저자
최선규, 하태정, 유병곤, 장성필, 권오명, 박형호
발행일
200805
출처
Ceramics International, v.34 no.4, pp.833-836
ISSN
0272-8842
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.ceramint.2007.09.088
협약과제
08MB1900, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
초록
Thermal-insulation properties of ordered mesoporous silica could possibly improve the efficiency of uncooled infrared imaging detector by introducing a mesoporous silica layer between TiN absorber and Si3N4 passivation layer. IR absorption rate of 50% porosity mesoporous silica was simulated and the results showed that above 90% infrared absorptance could be achieved in 8-12 μm wavelength region. Thermal conductivity of mesoporous silica was measured by 3?? method. Finite element modeling was used to simulate thermal isolation effect of mesoporous silica inserted structure. The result shows that an effective thermal-insulation effect could be obtained with 150 nm thick mesoporous silica layer. Also according to the simulation result of time transient temperature variation, it was found that mesoporous silica layer for thermal isolation induced an increase of 30% of residual temperature on TiN absorber. The mesoporous silica film was found to be a good thermal isolation layer for microbolometer. © 2007 Elsevier Ltd and Techna Group S.r.l.
키워드
B. Porosity, C. Thermal conductivity, D. SiO 2, E. Sensors
KSP 제안 키워드
Finite Element Method(FEM), Imaging detector, Infrared imaging, Ir absorption, Isolation effect, Isolation layer, Mesoporous silica film, Mesoporous silica layer, Ordered mesoporous silica, SiO 2, Temperature variations