ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

논문 검색
구분 SCI
연도 ~ 키워드

상세정보

학술지 졸-겔법으로 증착된 ZnO 나노 막대를 이용한 고감도 이산화질소 가스 센서 제작 및 특성 연구
Cited - time in scopus Download 0 time Share share facebook twitter linkedin kakaostory
저자
박소정, 곽준혁, 박종혁, 이홍열, 문승언, 박강호, 김종대, 김규태
발행일
200803
출처
센서학회지, v.17 no.2, pp.147-150
ISSN
1225-5475
출판사
한국센서학회
DOI
https://dx.doi.org/10.5369/JSST.2008.17.2.147
협약과제
08MB1800, 유비쿼터스 단말용 부품 모듈, 김종대
초록
Multiple ZnO nanorod device detecting NO2 gas was fabricated by sol-gel growth method and gas responsecharacteristics were measured as a chemical gas sensor. The device is mainly composed of sensing electrode and sensingnano material. To acquire high sensitivity of the device for NO2 gas it was heated by a heat chuck up to 400oC. Thesensing part was easily made using the CMOS compatible process, for example, the large area and low temperature nanomaterial growth process, etc. The sensors were successfully demonstrated and showed high sensitive response for NO2gas sensing.
KSP 제안 키워드
CMOS compatible process, Chemical gas sensor, Gas sensing, Growth method, Growth process, High Sensitivity, High sensitive, Low temperature(LT), Sensing electrodes, Sensitive response, Sol-gel growth