ETRI-Knowledge Sharing Plaform

ENGLISH

성과물

논문 검색
구분 SCI
연도 ~ 키워드

상세정보

학술지 High Resolution Capacitive Microinclinometer with Oblique Comb Electrodes Using (110) Silicon
Cited 11 time in scopus Download 0 time Share share facebook twitter linkedin kakaostory
저자
정대훈, 윤성식, Byung-Geun Lee, 이명래, 최창억, 이종현
발행일
201112
출처
IEEE Journal of Microelectromechanical Systems, v.20 no.6, pp.1269-1276
ISSN
1057-7157
출판사
IEEE, ASME
DOI
https://dx.doi.org/10.1109/JMEMS.2011.2167662
협약과제
09MB1600, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
초록
We propose a new capacitive microinclinometer where oblique comb electrodes and double-folded suspension springs are aligned parallel to the vertical (111) plane of (110) silicon. The oblique comb utilizes both the overlapped area and the gap between movable and stationary electrodes, resulting in a considerable increase in sensitivity (capacitance change/angle). The resolution becomes even higher by taking advantage of the smooth (111) sidewalls of the oblique comb electrodes, which are fabricated using silicon deep reactive ion etching followed by crystalline wet etching. The surface roughness was reduced from 200 (Rrms) to 20 nm (Rrms), and the verticality was improved from 88.7째 to 89.7째. The capacitance change of the fabricated inclinometer experimentally ranges from -0.793 to 0.783 pF for the full range of inclination angle (from -90째 to 90째). The estimated worst resolution, which is obtainable at an inclination angle of 짹 85째, was as low as 0.25째. © 2006 IEEE.
키워드
(110) silicon, Capacitive inclinometer, crystalline wet etching, high resolution, oblique comb electrode
KSP 제안 키워드
20 nm, Deep reactive ion etching, Full range, High-resolution, Reactive ion etching(RIE), Surface roughness, Wet etching, comb electrodes, folded suspension, inclination angle