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학술지 SOI CMOS-Based Smart Gas Sensor System for Ubiquitous Sensor Networks
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저자
맹성렬, Prasanta Guha, Florin Udrea, Syed Z. Ali, Sumita Santra, Julian Gardner, 박종혁, 김상협, 문승언, 박강호, 김종대, Youn Gjin Choi, William I. Milne
발행일
200810
출처
ETRI Journal, v.30 no.4, pp.516-525
ISSN
1225-6463
출판사
한국전자통신연구원 (ETRI)
DOI
https://dx.doi.org/10.4218/etrij.08.0108.0101
협약과제
07MB2600, 유비쿼터스 단말용 부품 모듈, 김종대
초록
This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at 200°C and showed a good response to 100 ppb NO2gas.
키워드
Micro-hotplate, NO gas sensing 2, SOI CMOS-based gas sensor platform technology, USN, ZnO nanorods
KSP 제안 키워드
CMOS circuits, Compact design, Design of the platform, Fully integrated, High Temperature, Micro-hotplate(MHP), NO gas sensing 2, SOI CMOS, Sensing element, Sensor system, Signal Processing