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학술지 Stress Reduction of Ge2Sb2Te5 by Inhibiting Oxygen Diffusion
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저자
박영삼, 임정욱, 양우석, 이승윤, 윤성민, 유병곤
발행일
200809
출처
Materials Transactions, v.49 no.9, pp.2107-2111
ISSN
1345-9678
출판사
Japan Institute of Metals
DOI
https://dx.doi.org/10.2320/matertrans.MRA2008042
초록
The unique solution to the stress reduction of Ge2Sb 2Te5 phase-change material has been known to cap a layer with an inherently huge compressive stress. In this paper, another approach to the stress reduction is firstly presented in view of the compositional change of Ge2Sb2Te5, particularly due to oxygen diffusion. During thermal cycles, we measured the radius changes using four kinds of samples and calculated their stress-changes using Stoney equation. In case of basic specimen, more oxygen in Ge2Sb2Te 5 and larger stress-change are observed as cycling temperature increases. In the rest of samples, the stress-change is reduced compared with the basic one, only when a capping layer on Ge2Sb2Te 5 blocks the oxygen penetration effectively. The stress increase by the oxygen diffusion is considered to be due to the lattice distortion of Ge2Sb2Te5. © 2008 The Japan Institute of Metals.
키워드
Germanium antimony tellurium alloy, Oxygen diffusion, Phase-change material, Stress
KSP 제안 키워드
Capping layer, Compressive stress, Oxygen diffusion, Phase Change Material(PCM), Stoney equation, Unique solution, lattice distortion, stress reduction, thermal cycle