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학술지 Sub-dB/cm Propagation Loss in Silver Stripe Waveguides
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저자
박선택, 주정진, 김진태, 김민수, 박승구, 이종무, 이욱재, 이명현
발행일
200901
출처
Optics Express, v.17 no.2, pp.697-702
ISSN
1094-4087
출판사
Optical Society of America(OSA)
DOI
https://dx.doi.org/10.1364/OE.17.000697
협약과제
08MB2200, 휴대 단말기용 나노 플렉시블 광전배선 모듈, 주정진
초록
We demonstrate sub-dB/cm propagation losses in polymer-based silver stripe waveguides at the wavelength of 1.31 m. The silver stripe waveguides were fabricated in a low-loss fluorinated polymer clad. To form uniform metal stripe patterns, which are essential for reducing propagation loss, we developed a lift-off process using double layers of photoresist and SiNx. A propagation loss of less than 1.0 dB/cm was obtained with the 11-nm-thick silver stripes in the width range of 1.5 - 4.5 m. A coupling loss of ~ 1.0 dB with a polarization maintaining single mode fiber was achieved for a width of 4.5 m. For a width of 2.0 m, we recorded a minimum propagation loss of 0.4 dB/cm, which is comparable with that of dielectric multi-mode waveguides. © 2009 OSA.
KSP 제안 키워드
Coupling loss, Double layer, Fluorinated polymers, Propagation loss, Single-mode fiber(SMF), Stripe patterns, lift-off process, low loss, multimode waveguide, polarization-maintaining, polymer-based