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학술지 비정질 실리콘 기반의 비냉각형 16×16 적외선 초점면 배열의 개발
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저자
전상훈, 조성목, 양우석, 류호준, 양기동, 최창억, 유병곤
발행일
200907
출처
센서학회지, v.18 no.4, pp.301-306
ISSN
1225-5475
출판사
한국센서학회
DOI
https://dx.doi.org/10.5369/JSST.2009.18.4.301
협약과제
08MB1900, 유비쿼터스용 CMOS 기반 MEMS 복합센서기술개발, 최창억
초록
This paper describes the design and fabrication of 16×16 microbolometer infrared focal plane arrays based on iMEMS technology. Amorphous silicon was used for infrared-sensitive material, and it showed the resistance of 18 Mohm and the temperature coefficient of resistivity of ?2.4 %. The fabricated sensors exhibited responsivity of 78 kV/W and thermal time constant of 8.0 msec at a bias voltage of 0.5 V. The array performances had satisfactory uniformity less than 5 % within one-sigma. Also, 1/f noise of pixel was measured and the noise factor of 6×10-11 was extracted. Finally, we obtained detectivity of 1.27×109cmHz0.5/W and noise equivalent temperature difference of 200 mK at a frame rate of 30 Hz.
KSP 제안 키워드
1/f Noise, Design and fabrication, Frame rate, Infrared Focal Plane Array(IRRPA), Noise factor, Thermal time constant(TTC), amorphous silicon, bias voltage, noise equivalent temperature difference, temperature coefficient of resistance(TCR)