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학술지 Adjusting Resonant Wavelengths and Spectral Shapes of Ring Resonators using a Cladding SiN Layer or KOH Solution
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저자
박상기, 김갑중, 이종무, 김인규, 김경옥
발행일
200907
출처
Optics Express, v.17 no.14, pp.11884-11891
ISSN
1094-4087
출판사
Optical Society of America(OSA)
DOI
https://dx.doi.org/10.1364/OE.17.011884
협약과제
09MB1100, 실리콘 기반 초고속 광인터커넥션 IC, 김경옥
초록
It is shown that the resonant frequencies and the transmission spectra of ring resonators can be adjusted by depositing or etching the cladding nitride layer on the ring waveguide without introducing an extra loss or extra variations of channel spacing. The cladding nitride layer increases the minimum width of the gap in the coupling region to larger than 150nm which makes it possible to consider photolithography instead of E-beam lithography for the typical design rule of ring filters. KOH silicon etching can also adjust not only the resonance frequencies but also coupling coefficients with a small sacrifice of guiding loss. © 2009 Optical Society of America.
키워드
(130.3120) Integrated optics devices, (130.7408) Wavelength filtering devices, (230.7390) waveguides, planar
KSP 제안 키워드
Channel spacing, Coupling Coefficient, Design rule, E-beam Lithography, Integrated optics devices, KOH silicon etching, KOH solution, Minimum width, Nitride layer, Resonance frequency, Resonant frequency(Fr)