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학술지 Templated Assembly of Metal Nanoparticles in Nanoimprinted Patterns for Metal Nanowire Fabrication
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저자
김은욱, 백강준, 노용영, 김동유, 이탁희, 박인규, 정건영
발행일
200909
출처
Nanotechnology, v.20 no.35, pp.1-6
ISSN
0957-4484
출판사
Institute of Physics (IOP)
DOI
https://dx.doi.org/10.1088/0957-4484/20/35/355302
협약과제
09IC1900, 개별물품 단위 응용을 위한 차세대 RFID 기술 개발, 채종석
초록
We have developed a new method that combines nanoimprint lithography and metal nanoparticle solution processing for fabricating metal nanowires. A polymer template with nanoscale features, fabricated by nanoimprint lithography, provided physical reservoirs which were filled with a silver nanoparticle solution during the spin-coating. After the lift-off process, the defined silver nanoparticle patterns were annealed to enhance the conductivity for use as electrodes. Silver nanowire patterns (500nm linewidth with a 300nm gap) were fabricated without using an expensive high-vacuum system for metal deposition. This method demonstrated pattern resolution enhancement compared with ink-jet printing which inherently suffers from ink spreading on the substrate surface. By using this method, organic thin film transistors composed of the solution-processed silver source/drain electrodes with a channel length of 300nm were fabricated and showed comparable behaviors to those with vacuum-deposited electrodes. © 2009 IOP Publishing Ltd.
KSP 제안 키워드
Channel Length, High vacuum, Nanoparticle solution, Nanoscale features, Organic thin-film transistors, Silver nanoparticle(AgNP), Silver nanowire(AgNW), Solution processing, Solution-processed, Source/drain electrodes, Spin coating