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학술지 On-chip, Planar Integration of Er Doped Silicon-rich Silicon Nitride Microdisk with SU-8 Waveguide with Sub-micron Gap Control
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저자
장지수, 엄석찬, 성건용, 신중훈
발행일
200912
출처
Optics Express, v.17 no.25, pp.22918-22924
ISSN
1094-4087
출판사
Optical Society of America(OSA)
DOI
https://dx.doi.org/10.1364/OE.17.022918
협약과제
09ZC1400, 메가컨버전스 핵심기술 개발, 손승원
초록
On-chip, planar integration of Er-doped Silicon-rich silicon nitride microdisks with SU-8 waveguide and polymer cladding is achieved. The lack of high temperature or etching processes allows back-end integration without any optical damage to the microcavity resonator. The maximum measured Q-factor at 1475.5 nm was 13,000, corresponding to calculated intrinsic resonator Q-factor of 25,000 that is limited by processrelated roughness. © 2009 Optical Society of America.
KSP 제안 키워드
5 nm, Er-doped, Gap control, High Temperature, On-chip, Optical damage, Polymer cladding, Quality-factor(Q-factor), SU-8, Silicon-rich silicon nitride, back-end