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학술지 Design and Fabrication of Tb3+-Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications
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저자
정훈, 이신영, 성건용, 신중훈
발행일
201101
출처
IEEE Photonics Technology Letters, v.23 no.2, pp.88-90
ISSN
1041-1135
출판사
IEEE
DOI
https://dx.doi.org/10.1109/LPT.2010.2091268
협약과제
11ZC1100, 메가컨버전스 핵심기술 개발, 함호상
초록
We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-μm diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated. © 2006 IEEE.
키워드
Biosensors, microresonators, rare-earth doping
KSP 제안 키워드
Design and fabrication, Low-cost, Quality-factor(Q-factor), Rare-earth doping, Tb-doped, Whispering gallery modes, doped silicon, microdisk resonator, silicon oxynitride