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학술지 Low-Voltage High-Performance Silicon Photonic Devices and Photonic Integrated Circuits Operating up to 30 Gb/s
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김경옥, 박정우, 김인규, 김상훈, 김상기, 이종무, 박건식, 주지호, 장기석, 오진혁, 김선애, 김종훈, 이준영, 박종문, 김도원, 정덕균, 황문상, 김정겸, 박규상, 치한규, 김현창, 김동욱, 조무희
Optics Express, v.19 no.27, pp.26936-26947
Optical Society of America(OSA)
11VB1100, 실리콘 나노포토닉스 기반 차세대 컴퓨터 칩기술, 김경옥
We present high performance silicon photonic circuits (PICs) defined for off-chip or on-chip photonic interconnects, where PN depletion Mach-Zehnder modulators and evanescent-coupled waveguide Ge-on-Si photodetectors were monolithically integrated on an SOI wafer with CMOS-compatible process. The fabricated silicon PICoff-chip for off-chip optical interconnects showed operation up to 30 Gb/s. Under differential drive of low-voltage 1.2 Vpp, the integrated 1 mm-phase-shifter modulator in the PIC off-chip demonstrated an extinction ratio (ER) of 10.5dB for 12.5 Gb/s, an ER of 9.1dB for 20 Gb/s, and an ER of 7.2 dB for 30 Gb/s operation, without adoption of travelling-wave electrodes. The device showed the modulation efficiency of V?L? ~1.59 Vcm, and the phase-shifter loss of 3.2 dB/mm for maximum optical transmission. The Ge photodetector, which allows simpler integration process based on reduced pressure chemical vapor deposition exhibited operation over 30 Gb/s with a low dark current of 700 nA at -1V. The fabricated silicon PICintra-chip for on-chip (intra-chip) photonic interconnects, where the monolithically integrated modulator and Ge photodetector were connected by a silicon waveguide on the same chip, showed on-chip data transmissions up to 20 Gb/s, indicating potential application in future silicon on-chip optical network. We also report the performance of the hybrid silicon electronic-photonic IC (EPIC), where a PICintra-chip chip and 0.13μm CMOS interface IC chips were hybridintegrated. © 2011 Optical Society of America.
KSP 제안 키워드
CMOS-compatible, Coupled waveguide, Differential drive, Ge-on-Si, High performance, IC chips, Low dark current, Mach-Zehnder(MZ), On-chip, Optical Interconnect(OI), Optical network