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학술지 Use of a Columnar Metal Thin Film as a Nanosieve with Sub-10 nm Pores
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저자
최동훈, 한용덕, 이병기, 최선진, 윤현철, 이대식, 윤준보
발행일
201207
출처
Advanced Materials, v.24 no.32, pp.4408-4413
ISSN
0935-9648
출판사
John Wiley & Sons
DOI
https://dx.doi.org/10.1002/adma.201200755
초록
A columnar-structured nanosieve is unique in the sense that it is a general thin film formed by physical vapor deposition (PVD). Instead of additional processes to make nanopores, the numerous voids naturally formed among columnar grains during PVD are used as nanopores. Since the thin film formed by PVD has vertically grown columnar grains, the fabricated nanosieve has numerous straight-opened nanopores, which is an ideal structure for a nanosieve. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
키워드
membrane process, nanopore, nanoporous membrane, nanosieve, physical vapor deposition
KSP 제안 키워드
Co. KGaA, Columnar grains, Ideal structure, Membrane Process, Nanoporous membrane, Sub-10 nm, metal thin film, physical vapor deposition, thin film(TF)