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학술지 Low Power Consumption Micro C2H5OH Gas Sensor Based on Micro-Heater and Ink Jetting Technique
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저자
문승언, 이형근, 최낙진, 강현태, 이재우, 안성덕, 강승열
발행일
201510
출처
Sensors and Actuators B : Chemical, v.217, pp.146-150
ISSN
0925-4005
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.snb.2014.10.034
협약과제
13VB4900, 구동 변위 10% 이상의 촉감과 3단계 이상의 질감 표현이 가능한 센싱과 구동 기능의 멀티터치센서 기초원천기술 개발, 안성덕
초록
Abstract Micro alcohol gas sensor was fabricated based on micro-heater by using CMOS compatible MEMS process and ink jetting technique. The paste for ink jetting deposition was based on semiconducting In2O3 powder. In the structure of micro-heater, two semi-circled Pt heaters, where some etching holes including etching hole in the center of the micor-heater exist, are connected to the spreader for thermal uniformity and reduction of the Si etching time. Based on the above design, low power consumption alcohol gas sensor was fabricated, which showed substantial sensitivity down to 0.05 ppm alcohol at low power consumption (24 mW).
키워드
Alcohol, Gas sensor, In O 2 3, Micro-heater, Surface micromachining
KSP 제안 키워드
Alcohol gas sensor, CMOS-compatible, Etching hole, MEMS process, Micro-heater, Sensor based, Si etching, Thermal uniformity, etching time, low power consumption, o 2 3