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학술지 Wafer-scale Crack-free AlGaN on GaN through Two-step Selective-area Growth for Optically Pumped Stimulated Emission
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저자
고영호, 배성범, 김성복, 김동철, 임영안, 조용훈, 남은수
발행일
201607
출처
Journal of Crystal Growth, v.445, pp.78-83
ISSN
0022-0248
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.jcrysgro.2016.04.021
협약과제
16MB1200, 소프트웨어 정의 네트워크(SDN) 기반 Flexible 광노드 핵심기술 개발, 백용순
초록
Crack-free AlGaN template has been successfully grown over entire 2-in. wafer by using 2-step selective-area growth (SAG). The GaN truncated structure was obtained by vertical growth mode with low growth temperature. AlGaN of second step was grown under lateral growth mode. Low pressure enhanced the relative ratio of lateral to vertical growth rate as well as absolute overall growth rate. High V/III ratio was favorable for lateral growth mode. Crack-free planar AlGaN was obtained under low pressure of 30혻Torr and high V/III ratio of 4400. The AlGaN was crack-free over entire 2-in. wafer and had quite uniform Al-mole fraction. The dislocation density of the AlGaN with 20% Al-composition was as low as ~7.6×108혻/cm2, measured by cathodoluminescence. GaN/AlGaN multi-quantum well (MQW) with cladding and waveguide layers were grown on the crack-free AlGaN template with low dislocation density. It was confirmed that the MQW on the AlGaN template emitted the stimulated emission at 355.5혻nm through optical pumping experiment. The AlGaN obtained by 2-step SAG would provide high crystal quality for highly-efficient optoelectronic devices as well as the ultraviolet laser diode.
키워드
A1. Crystal structure, A3. Metalorganic chemical vapor deposition, B1. Gallium compounds, B1. Nitrides, B2. Semiconducting III-V materials, B3. Laser diodes
KSP 제안 키워드
Dislocation density, Growth mode, Growth rate, Laser diode(LD), Low growth temperature, Metalorganic chemical vapor deposition, Multi-quantum-well, Optically pumped, Quantum Well(QW), Relative ratio, Second step