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학술지 Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification
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저자
김이경, 조민형, 이재우, 전영득, 노태문, 여준기, 양우석, 권종기
발행일
201604
출처
ETRI Journal, v.38 no.2, pp.235-243
ISSN
1225-6463
출판사
한국전자통신연구원 (ETRI)
DOI
https://dx.doi.org/10.4218/etrij.16.2515.0015
협약과제
14MB1600, 스마트&그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 권종기
초록
A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of 114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a 136 μA current consumption. The chip is occupied with an active area of 0.35 mm2 and a chip area of 0.54 mm2.
키워드
Capacitive microphone, MEMS, Microelectromechanical systems, Microphone, Positive feedback signal amplification, Source follower, Voltage booster
KSP 제안 키워드
20 Hz, Active area, Amplification technique, Chip area, Current consumption, Front-End, Low noise, MEMS Microphone, Micro-electro-mechanical system(MEMS), Microphone readout, Noise filter