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학술지 Toward Sub-micron Oxide Thin-film Transistors for Digital Holography
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저자
최지훈, 피재은, 황치영, 양종헌, 김기현, 김용해, 김희옥, 권오상, 박은숙, 황치선
발행일
201702
출처
Journal of the Society for Information Display, v.25 no.2, pp.126-135
ISSN
1071-0922
출판사
Society for Information Display (SID)
DOI
https://dx.doi.org/10.1002/jsid.535
협약과제
16MF1400, 디지털 홀로그래픽 테이블탑형 단말 기술 개발, 김진웅
초록
We fabricated, high performance 2-쨉m-channel oxide thin-film transistors (TFT) on glass substrate for 7-쨉m-pixel pitch spatial light modulator (SLM) panel for digital holographic applications. Furthermore, we succeeded, in the demonstration of the sub-micron TFTs, which is an inevitable route to the next-generation spatial light modulation devices with near 1-쨉m pixel pitch.
키워드
Digital hologram, Mix and match, Spatial light modulator on glass (SLMoG), Stitch, Sub-micron TFT, Wet treatment
KSP 제안 키워드
Digital hologram, Glass substrate, High performance, Mix and match, Next-generation, Spatial light modulator(SLM), Thin-Film Transistor(TFT), Wet treatment, digital holography, oxide thin-film transistors, spatial light modulation