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학술지 Low Power Consumption Solid Electrochemical-Type Micro CO2 Gas Sensor
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저자
이재우, 최낙진, 이형근, 김준수, 임솔이, 권정윤, 이승민, 문승언, 정종진, 유도준
발행일
201709
출처
Sensors and Actuators B : Chemical, v.248, pp.957-960
ISSN
0925-4005
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.snb.2017.02.040
초록
Micro carbon dioxide gas sensor with low power consumption and high selectivity was fabricated based on micro-heater and electrochemical operation method. Li3PO4 thick film for solid electrolyte and Li2CO3 thick film for sensing material were deposited successively using screen printing technique on Si substrate in the form of slurry. In structure of micro-heater, the resistances of the two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, a low power consumption carbon dioxide gas sensor was fabricated using a CMOS compatible MEMS process. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique. Micro gas sensor showed a value of about 50.5혻mV/decade for air based carbon dioxide gas with 59혻mW power consumption.
키워드
Carbon dioxide, Electrochemical, Gas sensor, MEMS
KSP 제안 키워드
Bridge type, CMOS-compatible, Carbon dioxide gas sensor, MEMS process, Micro gas sensor, Micro-heater, Micromachining technique, Operation method, Sensing material, Si substrate, Solid electrolyte