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학술지 A 10-channel Multiple Quantum Well Array Integrated with Selective Area Grown InGaAsP Layers on InP
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저자
김기수, 권오기, 오수환, 이철욱, 임영안, 남은수, 한원석, 장유동, 이동한
발행일
201811
출처
Applied Science and Convergence Technology, v.27 no.6, pp.153-155
ISSN
1225-8822
출판사
한국진공학회
DOI
https://dx.doi.org/10.5757/ASCT.2018.27.6.153
협약과제
18HB3300, 이동통신용 O-band Tunable DBR TOSA 개발, 김기수
초록
We present a ten-channel selective area grown multiple quantum well array with a wavelength of 8 nm spacing which can offer the tailored bandgap to each channel for application of monolithically integrated multi-channel devices.Scanning electron microscope images and photoluminescence spectra of the selective area grown layers for all channels are examined and analysed experimentally. We find out that, as a function of opening width, the thickness of selective area grown layers is linearly changed and the photoluminescence peak wavelength of selective area grown multiple quantum well array is varied with a quadratic shape. As a result, it is confirmed that extremely uniform and stable selective area grown layers can be obtained at the opened area between the adjacent mask patterns without significant degradation in spectral quality.
KSP 제안 키워드
Multiple-quantum-well(MQW), Opening width, Peak wavelength, Photoluminescence spectra, Quantum Well(QW), Scanning electron microscope images, Selective area, monolithically integrated, multi-channel, spectral quality