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학술지 Wafer-Level-Based Open-Circuit Sensitivity Model from Theoretical ALEM and Empirical OSCM Parameters for a Capacitive MEMS Acoustic Sensor
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저자
이재우, 임종필, 김정훈, 임솔이, 문승언
발행일
201902
출처
Sensors, v.19 no.3, pp.1-14
ISSN
1424-8220
출판사
MDPI AG
DOI
https://dx.doi.org/10.3390/s19030488
협약과제
18HB3800, IoT 불꽃감지용 ROIC 내장 CMOS-MEMS 표면가공기반 초소형 적외선 검출기 개발, 이재우
초록
We present a simple, accurate open-circuit sensitivity model based on both analytically calculated lumped and empirically extracted lumped-parameters that enables a capacitive acoustic sensor to be efficiently characterized in the frequency domain at the wafer level. Our mixed model is mainly composed of two key strategies: the approximately linearized electric-field method (ALEM) and the open-and short-calibration method (OSCM). Analytical ALEM can separate the intrinsic capacitance from the capacitance of the acoustic sensor itself, while empirical OSCM, on the basis of one additional test sample excluding the membrane, can extract the capacitance value of the active part from the entire sensor chip. FEM simulation verified the validity of the model within an error range of 2% in the unit cell. Dynamic open-circuit sensitivity is modelled from lumped parameters based on the equivalent electrical circuit, leading to a modelled resonance frequency under a bias condition. Thus, eliminating a complex read-out integrated circuit (ROIC) integration process, this mixed model not only simplifies the characterization process, but also improves the accuracy of the sensitivity because it considers the fringing field effect between the diaphragm and each etching hole in the back plate.
키워드
Capacitive MEMS acoustic sensor, Equivalent circuit-based modelling, On wafer level, Open-circuit sensitivity
KSP 제안 키워드
Acoustic Sensor, Calibration method, Capacitance value, Capacitive MEMS, Circuit-based, Equivalent Circuit, Equivalent electrical circuit, Error range, Etching hole, FEM simulation, Fringing field
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