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학술대회 Liquid Operating TPoS MEMS Resonators with High Quality Factor
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저자
제창한, 이현중, 양일석
발행일
201910
출처
IEEE Sensors 2019, pp.1-4
DOI
https://dx.doi.org/10.1109/SENSORS43011.2019.8956591
협약과제
19ZB1200, 임플란터블 능동 전자소자 원천기술 개발, 이정익
초록
In this work, we proposed a liquid operating TPoS MEMS resonators with on-chip dummy resonator patterns. The fabricated plate type resonators achieve high Q factors in length extensional mode under vacuum, air and liquid environment. With the proposed on-chip dummy resonator patterns, the anti-resonance peak near the resonant frequency was effectively cancelled and Q factors were improved. A resonator with 400 μm and 600 μm plate length shows a Q factor of 10,072 and 14,435, respectively, under 1.0 mTorr. Q factors in liquid phase were measured 71 and 98 in Ethanol, respectively. It was also confirmed that the Q factors in liquid phase varied with the types of liquids (according to their viscosity and density).
키워드
AlN, Aluminum nitride, liquid, quality factor, resonator, TPoS
KSP 제안 키워드
Aluminum Nitride(AlN), Extensional mode, High quality factor, Liquid environment, MEMS Resonators, On-chip, Quality-factor(Q-factor), Resonant frequency(Fr), anti-resonance peak, liquid phase