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학술지 Fast Response Formaldehyde Gas Sensor for USN Application
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저자
최낙진, 이형근, 문승언, 양우석
발행일
201212
출처
Sensors and Actuators B : Chemical, v.175, pp.132-136
ISSN
0925-4005
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.snb.2012.01.004
협약과제
12MB2400, 스마트&그린 빌딩용 자가충전 지능형 센서노드 플랫폼 핵심기술 개발, 김종대
초록
Semiconductor type gas sensors based on aluminum-doped zinc oxide with less than 50 nm particle size were fabricated on Si substrate to detect formaldehyde (HCHO) gas existing in building. It is very toxic and pollutant in air and especially, very dangerous for infants and kids. The prepared materials were very fine and uniform and we found out that crystallite sizes were about 10-25 nm through X-ray diffraction analysis and scanning electron microscopy. Gas response characteristics were examined for HCHO gas. In particular, the sensors showed responses to formaldehyde gas at sub ppm (cf, standard of natural environment in building is about 80 ppb), as a function of operating temperatures and gas concentrations. The lowest detection limit is HCHO 25 ppb and response of 800 ppb is about 60% at 350°C operating temperature. The response time of 8 s to HCHO gas is very fast compared to other commercial products in flow type measurement condition. Repetition measurement was very good with 짹 2% in full measurement range. © 2012 Elsevier B.V.
키워드
Fast response, Formaldehyde, Gas sensor, Metal oxide, USN
KSP 제안 키워드
5 nm, Aluminum-doped zinc oxide, Commercial products, Crystallite size, Detection limit, Flow type, Formaldehyde gas sensor, Gas response, Measurement condition, Measurement range, Metal-oxide(MOX)