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학술지 Electrical Properties of Solution-Deposited ZnO Thin-Film Transistors by Low-Temperature Annealing
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저자
임상철, 오지영, 구재본, 박찬우, 정순원, 나복순, 추혜용
발행일
201411
출처
Journal of Nanoscience and Nanotechnology, v.14 no.11, pp.8665-8670
ISSN
1533-4880
출판사
American Scientific Publishers (ASP)
DOI
https://dx.doi.org/10.1166/jnn.2014.10002
협약과제
13VB1900, 에너지 절감을 위한 7인치기준 2W급 환경적응 디스플레이 신모드 핵심 원천 기술 개발, 추혜용
초록
Flexible oxide thin-film transistors (Oxide-TFTs) have emerged as next generation transistors because of their applicability in electronic device. In particular, the major driving force behind solution-processed zinc oxide film research is its prospective use in printing for electronics. A low-temperature process to improve the performance of solution-processed n-channel ZnO thin-film transistors (TFTs) fabricated via spin-coating and inkjet-printing is introduced here. ZnO nanoparticles were synthesized using a facile sonochemical method that was slightly modified based on a previously reported method. The influence of the annealing atmosphere on both nanoparticle-based TFT devices fabricated via spin-coating and those created via inkjet printing was investigated. For the inkjet-printed TFTs, the characteristics were improved significantly at an annealing temperature of 150 °C. The field effect mobility. Vth and the on/off current ratios were 3.03 cm2/Vs, - 3.3 V, and 104, respectively. These results indicate that annealing at 150 °C 1 h is sufficient to obtain a mobility (μsat) as high as 3.03 cm2/Vs. Also, the active layer of the solution-based ZnO nanoparticles allowed the production of high-performance TFTs for low-cost, large-area electronics and flexible devices.
키워드
Inkjet printing, Low-Temperature, ZnO Nanoparticle
KSP 제안 키워드
1 H, 3 V, Active Layer, Annealing atmosphere, Annealing temperature, Driving forces, High performance, Low temperature(LT), Low-cost, Low-temperature process, N-channel