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학술지 Post-Annealing Effect on the Reactively Sputter-Grown CIGS Thin Films and its Influence to Solar Cell Performance
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저자
김제하, 이호섭, 박래만
발행일
201403
출처
Current Applied Physics, v.14 no.Supplement 1, pp.S63-S68
ISSN
1567-1739
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.cap.2013.11.040
협약과제
14PB1400, 윈도우 일체형 30인치급 터치센서 개발, 정우석
초록
Using a reactive co-sputtering from Cu0.6Ga0.4 and Cu0.4In0.6 alloy targets, we prepared CuIn1-xGaxSe2 (CIGS) thin films on Mo/soda-lime glass (SLG) in association with a thermal cracker for elemental atomic Se radicals. The film growth was performed at 500 °C for 90 min. To achieve the composition ratio of CIGS absorber layer, Cu0.6Ga0.4 target was set at RF power of 50 W, 60 W, 70 W, and 80 W while keeping at 100 W for Cu0.4In0.6 alloy target. Post-annealing was done for all the CIGS films at 550 °C for 30 min. The composition ratio of [Cu]/[In + Ga] and [Ga]/[In + Ga] was increased with RF power but showed no change after post-annealing. X-ray diffraction analysis revealed all the samples has grown dominantly in the [112] crystal orientation. We found the Cu2-xSe and (InGa)2-xSe3 defect phase both at the surface and in the bulk, and developed with post-annealing. From the devices fabricated in the structure of grid/ITO/i-ZnO/CdS/CIGS/Mo/soda-lime glass (SLG), the external quantum efficiency (EQE) was observed to improve in the wavelength, {\\lambda} ?돟 550 nm in the samples treated with annealing. In the current-voltage (J-V) measurements, the solar cell showed the best performance of FF = 54.1%, Voc = 0.48 V, Jsc = 33.1 mA/cm2 and η = 8.5% in the sample with [Cu]/[In + Ga] = 0.84 that improved largely from η = 4.6% for the solar cell with an as-grown CIGS films. © 2013 Elsevier B.V. All rights reserved.
키워드
CIGS, Composition ratio, External quantum efficiency, Post-annealing, Reactive co-sputtering, Solar cell
KSP 제안 키워드
48 V, Alloy target, As-grown, Best performance, CIGS absorber layer, CIGS film, CIGS thin films, Composition ratio, Current-voltage, External Quantum Efficiency, J-V