상세정보
학술지
Influence of Titania Cladding on SOI Grating Coupler and 5 μm-Radius Ring Resonator
- 저자
- 이종무
- 발행일
- 201503
- 출처
- Optics Communications, v.338, pp.101-105
- ISSN
- 0030-4018
- 출판사
- Elsevier
- 협약과제
- 13VB5800, 실리콘 포토닉스 기반 SDN용 12채널 4x8 광스위치 모듈 개발, 이종무
- 초록
- Titania cladding is deposited on a 5 μm-radius silicon-on-insulator ring resonator and grating couplers which are patterned by deep-ultraviolet lithography. The influence of titania cladding is studied by measuring the transmission spectra of the ring resonator coupled to a pair of single-mode fibers through the grating couplers. Temperature dependent wavelength shift of TE-like mode through the ring resonator is reduced to -20 to +20 pm/K from 74 pm/K without a noticeable degradation of insertion loss through the ring and the transmission peak of grating coupler is shifted at about 50 nm by the addition of titania cladding.
- KSP 제안 키워드
- Deep-ultraviolet, Silicon On Insulator(SOI), Silicon-on-insulator ring resonator, Single-mode fiber(SMF), Temperature-dependent, Transmission spectra, Ultraviolet lithography, grating coupler, insertion loss, wavelength shift