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Conference Paper Characterization of Silicon Nanowires Fabricated by Complementary Metal Oxide Semiconductor Technology
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Authors
Issue Date
2012-07
Citation
International Conference on Thermoelectrics (ICT) 2012, pp.1-15
Language
English
Type
Conference Paper
KSP Keywords
Complementary metal-oxide-semiconductor(CMOS), Metal-oxide(MOX), Semiconductor technology, Silicon nanowires(SiNWs)
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