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학술대회 Chip-Level Calibration Method Using Improved NFA on CPPs and MPs for the NFS Standardization
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저자
이필수, 김창균, 위재경, 김부균, 최재훈, 여순일, 정창원
발행일
201205
출처
Asia-Pacific Symposium on Electromagnetic Compatibility (APEMC) 2012, pp.177-180
DOI
https://dx.doi.org/10.1109/APEMC.2012.6237862
협약과제
12MB1800, 차세대 반도체 장비 및 소자의 표준화 기술, 여순일
초록
Anew calibration method for the near-field scanning (NFS) system is presented. The proposed calibration method consists of a new near field probe (NFP), circular patch patterns (CPPs), and meander patterns (MPs). The proposed method improved spatial resolution and simplifying a calibration procedure for the NFP compared to the conventional method defined in IEC61967-3 and 6. Also, the effect of the NFP length on frequency response was investigated with lengths of 8 mm and 30 mm. We designed and fabricated CPPs of diameter (D) = 20, 40, 60, 100 mm and MPs of various widths and spaces. Thus, we found reverse relations between spatial resolutions and heights of measuring points with the simplified calibration procedure. The testing result shows that a spatial resolution of 120 μm a height of 200 μm was verified without complex correlation algorithms under 8 GHz. For manufacturing cost all patterns and the NFP were realized with low-cost fabrication using PCB (FR-4) not by a conventional LTCC process. © 2012 IEEE.
KSP 제안 키워드
Calibration method, Calibration procedure, Circular patch, Conventional methods, Correlation algorithm, FR-4, Frequency response(FreRes), Near field probe, Simplified calibration, complex correlation, low-cost fabrication