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Conference Paper
Dual-Focus Dual-Layered Microlens Array
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- Authors
- Jong-Moo Lee, Dong Hyo Lee, YongSoon Baek
- Issue Date
- 2012-07
- Citation
- Opto-Electronics and Communications Conference (OECC) 2012, pp.889-890
- Language
- English
- Type
- Conference Paper
- Abstract
- Dual-focus microlenses combining dual layers of spherical lens are proposed and fabricated through dual photo lithography processes and a dry etching process. Two types of dual-layered microlenses are fabricated, one with a combination of a small lens on a large lens and another combination of a small low-index lens within a large highindex lens. © 2012 IEEE.
- KSP Keywords
- Etching process, Microlens array, Spherical lens, dry etching, photo lithography