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Conference Paper
Effect of ICP power on the electrical & optical properties of Ti-doped ITO films formed by ionized physical vapor deposition method
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- Authors
- Issue Date
- 2012-07
- Citation
- International Conference on Microelectronics and Plasma Technology (ICMAP) 2012, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- ICP power, ITO film, Ionized physical vapor deposition, Ti-doped ITO, Vapor deposition method, optical properties