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Effect of ICP power on the electrical & optical properties of Ti-doped ITO films formed by ionized physical vapor deposition method
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- 저자
- 발행일
- 201207
- 출처
- International Conference on Microelectronics and Plasma Technology (ICMAP) 2012, pp.1-1
- 협약과제
- 12VB1700, 윈도우 일체형 30인치급 터치센서 개발, 정우석
- KSP 제안 키워드
- ICP power, ITO film, Ionized physical vapor deposition(IPVD), Ti-doped ITO, Vapor deposition method, optical properties