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Conference Paper
Effect of Inductively Coupled Plasma on the Electrical and Optical Properties of Indium Tin Oxide Films Deposited by Ionized Physical Vapor Deposition
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- Authors
- Issue Date
- 2012-10
- Citation
- Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME) 2012, pp.1-1
- Language
- English
- Type
- Conference Paper
- KSP Keywords
- Indium Tin Oxide(ITO), Indium tin oxide films, Ionized physical vapor deposition, electrical and optical properties, inductively coupled plasma(ICP)