상세정보
학술대회
Effect of Inductively Coupled Plasma on the Electrical and Optical Properties of Indium Tin Oxide Films Deposited by Ionized Physical Vapor Deposition
Cited - time in 
Download 0 time
Share 
Download 0 time
Share
- 저자
- 발행일
- 201210
- 출처
- Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME) 2012, pp.1-1
- 협약과제
- 12VB1700, 윈도우 일체형 30인치급 터치센서 개발, 정우석
- KSP 제안 키워드
- Electrical and optical properties, Indium tin oxide films, Inductively-coupled plasma(ICP), Ionized physical vapor deposition(IPVD), indium tin oxide(ITO)