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Conference Paper High Power Light Emitting Diode with Graphene Transparent Electrode
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Authors
Doo-Hyeb Youn, Hong-Kyw Choi, Young-Jun Yu, Seung-Hwan Kim, Seong-Ran Jeon, Sung-Yool Choi, Choon-Gi Choi
Issue Date
2012-04
Citation
International Conference on Graphene 2012, pp.1-2
Language
English
Type
Conference Paper
Abstract
High performance LEDs were fabricated using graphene transparent conducting electrode in ultraviolet (UV) and green region. In order to prevent the graphene delamination, two-layer lithographic patterning consisting of non-photosensitive low viscosity layer and common photoresist, was first demonstrated.Here we introduce the low-viscosity interfacial layer which prevents the strong interaction between photoresist and chemical groups on graphene. CVD (Chemical Vapor Deposition) graphene was doped by chemical treatment process using HNO 3 solution. O 2 plasma treatment process was introduced to increase the adhesion between Cr/Au electrode and p-GaN. Two layer lithograpjhic patterning and chemical doping of graphene resulted in enhancement of the current spreading over the p-GaN and the high power LED operation.
KSP Keywords
Au electrode, Chemical Vapor Deposition, Chemical groups, HNO 3, High Power LED, High Power Light Emitting Diode, High performance, Interfacial layer, Lithographic patterning, O 2, Treatment process