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Conference Paper In-situ grown hexagonal silicon nanocrystals in silicon-carbide-based films
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Authors
Tae-Youb Kim, Cheol-Jong Choi, Chul Huh, Nae-Man Park, Hojun Ryu, Maki Suemitsu
Issue Date
2012-08
Citation
IUMRS International Conference in Asia (IUMRS-ICA) 2012, pp.1-1
Language
English
Type
Conference Paper
KSP Keywords
In-Situ, Silicon nanocrystals(Si NCs), silicon carbide(3C-SiC)