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학술지 High Roughness Ag Back Reflector on a Metal Underlayer for Thin Film Solar Cell Applications
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저자
이유정, 연창봉, 윤선진, 이규성, 임정욱, 김경보, 백제훈
발행일
201312
출처
Materials Research Bulletin, v.48 no.12, pp.5093-5098
ISSN
0025-5408
출판사
Elsevier
DOI
https://dx.doi.org/10.1016/j.materresbull.2013.07.032
협약과제
12MB4900, 유연성 철강소재기판상에서 효율13%를 갖는 Si/SiGe 탠덤 박막태양전지개발, 윤선진
초록
The roughness development of Ag film was investigated for potential as a back reflector material in thin film solar cells on flexible stainless steel (STS) substrates. The influence of metal underlayers was evaluated in order to obtain a rough Ag film at a low deposition temperature (?돞400 °C). By depositing Ag on a 100 nm Al underlayer to induce Ag-Al alloying, the film roughness was increased three times more than that of Ag films on bare STS at 400 °C. The Ag film deposited on an Al underlayer at 350 °C exhibited 75 nm roughness and uniformly distributed crystallites, which was effective for visible light scattering. The Ag-Al alloy phase was also controlled using the thickness ratio of Ag and Al. The present work clearly demonstrated that an Ag back reflector film with a higher roughness could be fabricated through inserting a metal underlayer at a deposition temperature much lower than the 500 °C that has been reported in earlier works. © 2013 Elsevier Ltd. All rights reserved.
키워드
A. Metals, A. Thin films, D. Surface properties
KSP 제안 키워드
5 nm, Ag film, Ag-Al, Al alloying, Back reflector, Film roughness, Roughness development, Stainless steel(SUS316), Thickness ratio, Thin film solar cells, Uniformly distributed