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Conference Paper
Structure-Based Equivalent Circuit Modeling of a Capacitive-Type MEMS Microphone
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- Authors
- Jaewoo Lee, C.H. Je, W.S. Yang, Jongdae Kim
- Issue Date
- 2012-10
- Citation
- International Symposium on Communications and Information Technologies (ISCIT) 2012, pp.228-233
- Publisher
- IEEE
- Language
- English
- Type
- Conference Paper
- Abstract
- Structure-based equivalent circuit modeling for a capacitive-type MEMS acoustic sensor is presented. The model is subsequently divided into three main areas: acoustic, mechanical, and electrical domains. Furthermore, it is composed of three different parameter groups: empirical, theoretical, and mixed data. With an extraction method using measured values, the compliance of a diaphragm and the zero-bias intrinsic capacitance were evaluated to 3.430 × 10-3 m/N and 1.02 pF, respectively, whereas the viscous resistance of acoustic holes and an equivalent mass were calculated to be 2.958 × 108 kg/s·m4 and 7.856 × 10-10 kg, respectively, with theoretical calculation from geological dimension. To verify the proposed model, the open-circuit sensitivities were compared between the modeled and measured values. The MEMS microphone had an open-circuit sensitivity of -48.5 dBV/Pa at 1 kHz with a bias of 10.4 V, while the modeled open-circuit sensitivity was -48.6 dBV/Pa, which shows good agreement in the range from 100 Hz to 18 kHz. That indicates the validation of the structure-based equivalent circuit model to predict and design the MEMS microphone.